Stiction problems in releasing of 3D microstructures and its solution
نویسندگان
چکیده
Micro-stereolithography ( SL) is capable of fabrication of highly complex three-dimensional (3D) microstructures by selectively photo-induced polymerization from the monomer resin. However, during the evaporative drying of structures from liquid resin, the 3D microstructures often collapse due to the capillary force. In this work, a theoretical model is developed to analyze the deflection and adhesion between thin polymer beams under capillary force. The detachment length of the test structures and adhesion energy of a typical SL polymer (HDDA) are obtained experimentally which are important for MEMS structure design. Finally, we successfully developed a sublimation process to release the 3D microstructures without the adhesion. © 2006 Elsevier B.V. All rights reserved.
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